Advantages:

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There is no need to make special target material, and the initial consumable input cost is low;

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It will not or rarely cover both sides of the target 3D structure, usually only deposited on the target

surface, which is more suitable for Lift-Off process;

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One electron gun can accommodate up to 8 crucible, can achieve multiple materials in the same

process alternately deposition or multiple electron guns at the same time to achieve codeposition;

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Fast evaporation rate, can achieve mass production;

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Suitable for crystal oscillator controller or optical controller, precise control of thin film growth.

Application:

Mainly used in semiconductor, microelectronics, optics, lasers, infrared and other fields.

Our electron beam   system:

Vikaitech can provide a variety of electron beam evaporation products for customers in different

fields, you can choose a variety of ion sources to achieve ion beam assisted deposition, you can also

choose a variety of different tools to achieve different process requirements.

Selection of   electron beam evaporation system jigs & fixtures:

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Dome: the most widely used kind of hanger, the loading capacity is large, the uniformity is good,

can meet the needs of most customers;

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Planetary: The sample can achieve public rotation in the process cavity, and this structure has

higher coating uniformity and larger loading capacity;

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Knusten type: The process cavity can accommodate up to three disc type workpiece disks at the

same time, large loading capacity, more suitable for mass production;

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Automatic flip: the workpiece can be automatically flipped in the furnace, which is more suitable

for laser end coating applications;

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Water-cooled: the workpiece plate can be cooled by water, which is more suitable for Lift-Off

process;

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Heating type: the workpiece disc can be equipped with a heating disc, the maximum heating to

500℃, can effectively improve the adhesion of the film layer;

Both water-cooled and heated workpieces can be equipped with RF power supply to do RF

pre-cleaning on the surface of the workpiece.

Vikaitech can also provide Multi-chamber Integrated Electron Beam Evaporation System and Upper

and Lower Two-chamber Electron Beam Evaporation System according to different applications.