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Load-Lock:

Automatic Load-Lock chamber, optional

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Pumping system:

Crypump/Magnetic suspension molecular pump + Dry pump

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Vacuum gauge:

Full range vacuum gauge + Capacitive diaphragm vacuum gauge

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Flow control:

Mass flow controller

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Sputter power supply:

DC/RF/Pulse DC, can be switched freely

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Bias:

RF/Pulse DC

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Ion source:

Anode & Kaufman & RF ion source, optional

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Ultimate vacuum:

3E-5Pa

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Temperature control range:

RT to 300℃

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Uniform deposition area:

1000mm（L）*1000mm（W）

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Coating uniformity:

±3%

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Coating repeatability:

±2%

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Space requirements:

6.0m（Length）*3.7m（Width）*2.7m（Height）