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Load-Lock:

Single/Multi-chip automatic Load-Lock chamber, optional

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Pumping system:

Cryopump/Magnetic suspension molecular pump + Dry pump

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Vacuum gauge:

Full range vacuum gauge

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Power supply:

Max. 10 kW

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Number of crucible:

Up to 6

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Ion source:

Hall ion source

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Film thickness monitor:

Film deposition controller

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Fixtures:

Dome & Knudzin & Plate

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Workpiece Angle:

-45° to +45°

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Ultimate vacuum:

1E-5Pa

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Temperature control range:

-50℃ to 500℃

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Uniform deposition area:

Max. Ø200mm

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Coating uniformity:

±3%

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Coating repeatability:

±2%

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Space requirements:

3.3m（Length）*3.0m（Width）*2.5m（Height）