北京维开科技有限公司 Beijing Vikaitech Ltd.

 E500D Dual Chamber E-Beam Eevaporation System

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Load-Lock:

Single/Multi-chip automatic Load-Lock chamber, optional

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Pumping system:

Cryopump/Magnetic suspension molecular pump + Dry pump

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Vacuum gauge:

Full range vacuum gauge

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Power supply:

Max. 10 kW

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Number of crucible:

Up to 6

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Ion source:

Kaufman & Hall ion source

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Film thickness monitor:

Film deposition controller

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Fixtures:

Dome & Plate

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Workpiece Angle:

-45° to +45°

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Ultimate vacuum:

1E-5Pa

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Temperature control range:

RT to 500℃

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Uniform deposition area:

Max. Ø260mm

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Coating uniformity:

±2%

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Coating repeatability:

±2%

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Space requirements:

3.2m（Length）*2.4m（Width）*2.8m（Height）


For more information, please contact us‍

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E500D is a R&D electron beam evaporation system developed by Vikaitech. The upper and lower chambers serve as loadlock chambers for each other, which effectively solves the problem of evaporation equipment being difficult to equip with loadlock chambers. It can meet the needs of small and medium-sized batch production and high-end experimental platform's requirements.   
Application
Beijing Vikaitech Ltd.

京公网安备 11011302002087号

Mobile:

86-18610939939

Phone:

86-010-63183516

Web:

www.vikaitech.com

E-Mail:

sales@vikaitech.com

Address:


Building 5, No. 6 Caiyuan Road,

Shunyi District, Beijing, China

Zip Code:

101300