北京维开科技有限公司 Beijing Vikaitech Ltd.

 Ion500E Ion Beam Etch system

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Pumping system:

Crypump/Magnetic suspension molecular pump + Dry pump

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Vacuum gauge:

Full range vacuum gauge + Capacitive diaphragm vacuum gauge

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Flow control:

Mass flow controller

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Bias:

RF/Pulse DC

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Ion source:

RF & DC ion source, optional

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Ultimate vacuum:

1E-5Pa

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Temperature control range:

RT to 500℃

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Uniform Etch area:

Max. Ø150mm

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Etch uniformity:

±5%

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Space requirements:

1.5m（Length）*1.8m（Width）*2.1m（Height）


For more information, please contact us‍


Ion500E is a general-purpose ion beam etch system developed by Vikaitech. It has powerful function, stable and reliable, high degree of automation control, simple maintenance, and can meet the needs of small and medium-sized batch production and the general needs of experimental platforms.
Application
Beijing Vikaitech Ltd.

京公网安备 11011302002087号

Mobile:

86-18610939939

Phone:

86-010-63183516

Web:

www.vikaitech.com

E-Mail:

sales@vikaitech.com

Address:


Building 5, No. 6 Caiyuan Road,

Shunyi District, Beijing, China

Zip Code:

101300