§

Vacuum process chamber:

1 stainless steel chamber

§

Load-Lock:

1 set of independent manual Load-Lock chamber

§

Pumping system:

Diffusion pump + Mechanical pump

§

Vacuum gauge:

Full range vacuum gauge

§

Flow control:

Mass flow controller

§

Number of electron guns:

3 to 4 electron guns can be connected in parallel

§

Filament current:

120A

§

Electron beam current:

3A

§

Ultimate vacuum:

5E-4Pa

§

Temperature control range:

1200℃

§

Uniform deposition area:

Ø500mm

§

Coating uniformity:

±5%