北京维开科技有限公司 Beijing Vikaitech Ltd.

 E1100D Dual Chamber E-Beam Eevaporation System

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Pumping system:

Cryopump/Magnetic suspension molecular pump + Dry pump

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Vacuum gauge:

Full range vacuum gauge

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Power supply:

Max. 10 kW

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Number of crucible:

Up to 8

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Ion source:

RF & Kaufman & Hall ion source

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Film thickness monitor:

Film deposition controller

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Fixtures:

Dome & Planetary

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Ultimate vacuum:

1E-5Pa

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Temperature control range:

RT to 300℃

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Uniform deposition area:

Max. Ø960mm

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Coating uniformity:

±2%

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Coating repeatability:

±2%

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Space requirements:

3.9m（Length）*5.0m（Width）*3.2m（Height）


For more information, please contact us‍

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E1100D is a production-type electron beam evaporation system developed by Vikaitech. It has large coating area, stable operation, high degree of automation control, and simple maintenance, is able to meet the needs of evaporation coating for mass production and large-size workpieces.   
Application
Beijing Vikaitech Ltd.

京公网安备 11011302002087号

Mobile:

86-18610939939

Phone:

86-010-63183516

Web:

www.vikaitech.com

E-Mail:

sales@vikaitech.com

Address:


Building 5, No. 6 Caiyuan Road,

Shunyi District, Beijing, China

Zip Code:

101300