北京维开科技有限公司 Beijing Vikaitech Ltd.

 E1500F Semi-degree Automatic E-Beam Eevaporation System

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Pumping system:

Cryo pump/Magnetic suspension molecular pump + Dry pump

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Vacuum gauge:

Full range vacuum gauge

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Power supply:

Max. 10 kW

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Thermal evaporation source:

Optional

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Ion source:

DC&RF

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Film thickness monitor:

Film deposition controller

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Fixtures:

Planetary

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Ultimate vacuum:

1E-5Pa

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Temperature control range:

RT to 200℃

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Uniform deposition area:

Max. 12*Ø200mm

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Coating uniformity:

±2%

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Coating repeatability:

±2%

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Space requirements:

9.5m（Length）*5.6m（Width）*3.5m（Height）


For more information, please contact us‍

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E1500F is a wafer-level fully automatic electron beam evaporation system developed by Vikaitech. It is equipped with an EFEM system, powerful, stable and reliable, has simple maintenance, and can meet the needs of mass production.   
Application
Beijing Vikaitech Ltd.

京公网安备 11011302002087号

Mobile:

86-18610939939

Phone:

86-010-63183516

Web:

www.vikaitech.com

E-Mail:

sales@vikaitech.com

Address:


Building 5, No. 6 Caiyuan Road,

Shunyi District, Beijing, China

Zip Code:

101300