北京维开科技有限公司 Beijing Vikaitech Ltd.

 E800D Dual Chamber E-Beam Eevaporation System

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Load-Lock:

Single/Multi-chip automatic Load-Lock chamber, optional

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Pumping system:

Cryopump/Magnetic suspension molecular pump + Dry pump

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Vacuum gauge:

Full range vacuum gauge

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Power supply:

Max. 10 kW

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Number of crucible:

Up to 6

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Ion source:

Kaufman & Hall ion source

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Film thickness monitor:

Film deposition controller

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Fixtures:

Dome & Plate

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Workpiece Angle:

-45° to +45°

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Ultimate vacuum:

1E-5Pa

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Temperature control range:

RT to 500℃

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Uniform deposition area:

Max. Ø300mm

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Coating uniformity:

±2%

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Coating repeatability:

±2%

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Space requirements:

4.0m（Length）*3.1m（Width）*3.0m（Height）


For more information, please contact us‍

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E800D is a universal electron beam evaporation system developed by Vikaitech. It is powerful, stable and reliable, has a high degree of automation control and is simple to maintain. It can meet various process requirements for electron beam evaporation in production and research and development.

   
Application
Beijing Vikaitech Ltd.

京公网安备 11011302002087号

Mobile:

86-18610939939

Phone:

86-010-63183516

Web:

www.vikaitech.com

E-Mail:

sales@vikaitech.com

Address:


Building 5, No. 6 Caiyuan Road,

Shunyi District, Beijing, China

Zip Code:

101300