§

Pumping system:

Cryopump/Magnetic suspension molecular pump + Dry pump

§

Vacuum gauge:

Full range vacuum gauge

§

Power supply:

Max. 10 kW

§

Number of crucible:

Up to 8

§

Ion source:

RF & Kaufman & Hall ion source

§

Film thickness monitor:

Film deposition controller

§

Fixtures:

Dome & Knudzin & Planetary

§

Ultimate vacuum:

2E-5Pa

§

Temperature control range:

RT to 300℃

§

Uniform deposition area:

Max. Ø300mm

§

Coating uniformity:

±2%

§

Coating repeatability:

±2%

§

Space requirements:

4m（Length）*4m（Width）*3m（Height）